本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
对光学系统输出刀口像的一阶导数做傅里叶变换，可以得到该系统的光学传递函数（OTF）。
The OTF (Optical Transfer Function) of an optical system can be evaluated by the Fourier Transform of the first derivative of the optical image of an knife-edge (object).
给出了光学系统图、纵向像差图及调制传递函数图。
The figures of optical system, longitudinal aberration and modulation transfer function (MTF) are given.
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