半导体器件。集成电路。第20部分：薄膜集成电路及混合薄膜集成电路的总规范。
Semiconductor devices. Integrated circuits. Part 20: Generic specification for film integrated circuits and hybrid film integrated circuits.
半导体器件。集成电路。第20部分：薄膜集成电路及混合薄膜集成电路的总规范。
Semiconductor devices. Integrated circuits. Part 20: Generic specification for film integrated circuits and hybrid film integrated circuits.
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