以在位监测为辅助工具，研究了蓝宝石衬底氮化的影响。
With the aid of in situ monitoring tool, we have investigated the effects of substrate nitridation.
结果表明经过化学机械抛光随后再经腐蚀后的蓝宝石衬底的表面性能最好。
The results show that the surface properties of it with CMP, and then chemically etching are best.
目前LED同硅晶片的制作设备类似，都是通过在蓝宝石衬底片上沉淀氮化镓层实现。
At present these LEDs are made in machines similar to those used to make silicon chips, by depositing layers of gallium nitride on sapphire-based wafers.
最后讨论了在经过校温的系统上进行蓝宝石衬底的氢氮等离子体清洗实验，并通过RHEED图像评价清洗结果质量。
The cleaning of hydrogen and nitrogen ECR plasma on sapphire substrates are carried out in the calibrated temperature system and evaluated by analyzing RHEED image in ECR-PEMOCVD system.
通过对蓝宝石衬底片精密加工的设备、工具、辅料、清洗等方面的研究，优化了衬底片加工工艺，提高了衬底片加工质量，且降低了加工成本。
It can obviously improve the quality of substrate sapphire's appearance and reduce the production cost to ameliorate technological parameters of precision cutting process.
每一个二极管都从硅(或者蓝宝石为衬底的)晶片上切割下来。
Each diode is cut from a wafer of crystals layered over a base of silicon or sapphire.
每一个二极管都从硅(或者蓝宝石为衬底的)晶片上切割下来。
Each diode is cut from a wafer of crystals layered over a base of silicon or sapphire.
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