研究了新型的复合静电磁浸没透镜的曲光轴高斯电子光学性质及像差特性。
Curvilinear axis Gaussian electron optical properties and aberration characteristics of the novel electrostatic immersion magnetic lenses are studied.
我们设计了一种连续相位滤波器，该滤波器可以优化固体浸没透镜系统的光场分布。
This aberration may cause the degradation of the image of sample. We design a continuous phase filter and optimize the optical field distribution of SIL system.
但是，固体浸没透镜光存储系统必须解决精密聚焦伺服问题和动态飞行高度控制问题。
But to use SIL recording, the problems of the focusing servo and the dynamically flying height control of the SIL must be solved.
从激光探测告警光学系统的视场和光学增益出发，分析了浸没透镜的光学增益和像差特性。
The optical gain and aberration characteristics of immersion lens are analyzed based on FOV and optical gain of optical systems used in laser warning device.
应用高数值孔径系统的矢量衍射理论研究了半球形固体浸没透镜(SIL)球面表面的反射对SIL系统透射场的影响。
The reflection effect of the spherical surface of a hemisphere solid immersion lens (SIL) has been investigated using the vectorial diffraction theory for high numerical aperture systems.
本发明公开一种设备和方法，用于在更换平板印刷机(10)中工件(208)期间，将浸没流体(212)保持在邻接投射透镜(16)的间隙中。
An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed.
本发明公开一种设备和方法，用于在更换平板印刷机(10)中工件(208)期间，将浸没流体(212)保持在邻接投射透镜(16)的间隙中。
An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed.
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