由于短波长激光更易造成光学元件的损伤，因此光学元件的损伤阈值限制了氟化氪激光器的能量输出。

The damage threshold of optics limits the output of KrF laser because the laser with shorter wavelength is easier to induce damage on the optical elements.

youdao

由于短波长激光更易造成光学元件的损伤，因此光学元件的损伤阈值限制了氟化氪激光器的能量输出。

The damage threshold of optics limits the output of KrF laser because the laser with shorter wavelength is easier to induce damage on the optical elements.

youdao