研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
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