论述了一种新的微细电火花加工方法。
A novel micro electrical discharge machining (EDM) method is described.
器件构造工艺采用微细电火花加工技术。
微能脉冲电源是微细电火花加工的一项关键技术。
Pulse power supply with micro energy is a core technique for micro-EDM.
微能脉冲电源是微细电火花加工机床上的重要组成部分。
The micro-energy pulse generator is one of the key components of the micro-EDM machine tool.
展望了微细电火花加工在微三维结构加工中的应用前景。
The prospective application of micro-EDM in the manufacture of micro three-dimensional structures is discussed as well.
从硅材料的物理性能出发，分析其微细电火花加工的可行性。
This paper analyses the micro EDM feasibility for semiconductor silicon from the physical properties of silicon.
放电单脉冲能量的精确控制是实现微细电火花加工的关键技术之一。
The accurate control of single pulse discharge energy is one of key techniques in micro-EDM.
简要地综述了国际上微细电火花加工的最新进展，并给出了部分加工实例。
A summary of the latest international achievements on micro EDM and some examples are given.
在微细电火花加工中，它是决定微细工件和微细电极的极限加工能力的关键因素之一。
They are key factors to limit the machining ability of micro-workpiece and micro-electrode.
分析了微能脉冲电源的实现途径，设计开发出了满足微细电火花加工用的微能脉冲电源。
The way of realizing micro energy pulse power source is analyzed. A micro energy pulse power source used by micro-EDM is developed.
介绍了几种用于微细电火花加工方面的新型装置及其性能，同时还指出这些装置的局限性。
Several novel devices by using this technology and their performance were introduced. The limitations of the devices were described.
微细电火花加工方法具有宏观作用力小、可控性好等特点，是目前进行微喷阵列孔加工的重要方法。
MEDM has a feature of small macroscopic applied force and good controllability, and thus is an important means of processing array micro-jet holes at present.
基于可重构机床模块化的设计方法，设计了一套可进行微细电火花加工和微细电解加工的多功能微细电加工系统。
According to the method of modular design of reconfigurable machine tool, a multifunctional system for micro electro-discharge machining (EDM) and electrochemical micromachining (EMM) was designed.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
介绍了电火花加工用工具电极材料在普通电火花加工、电火花表面改性和微细电火花加工三个方面的最新研究进展。
The latest research progress in tool electrode materials of EDM used in conventional EDM, EDM surface modification and Micro-EDM has been introduced.
设计了一个用于在微细电火花加工控制中放电参数检测的高速数据采集系统，对其硬件电路进行了分析和讨论，并给出了软件说明。
A high speed data acquisition system for measurement of Micro EDM discharge parameter is designed. The hardware circuits are analyzed and discussed, also the software function is present.
增强工具电极材料的耐电蚀能力，降低电极损耗是微细电火花加工技术可靠、稳定且高效制造高深宽比微结构和器件的研究关键之一。
Enhancing electrical erosion resistance of tool electrode and reducing electrode wear is one of research keys to fabricate HARMs with micro EDM technology reliably, stably and efficiently.
常规放电状态检测方法由于仅采用单一的特征量进行状态判别，因此在加工信号频率高、加工波形产生畸变的微细电火花加工中，不再适用。
Conventional discharge condition detection methods extracting only certain eigenvalue are not suitable for the Micro-EDM due to the high frequency and distortion of voltage wave shape.
针对三维金属微细结构的微细电火花加工，应用等损耗理论，采用分层加工的方法，建立了单道加工时底面形状随电极损耗而变化的轮廓模型。
Micro 3D structure machining with simple shaped electrode can't generally apply the method of common mechanical milling for the reason of electrode wear, Machining conditions and etc.
当今脉宽调制技术在电火花微细加工所使用的脉冲电源中得到广泛应用。
Now pulsewidth modulating technology is widely used in pulse power needed by electric spark fine machining.
加工工艺参数准确合理的分析方法是优化组合电火花微细加工中多目标工艺参数的重要前提和保证。
The accurate analysis method of performances plays an important role in the optimization with multiple performance objectives of micro electrical discharge machining (EDM).
对微细电火花沉积加工中沉积所得不同微细结构的成形机理进行了研究。
The forming mechanism of different micro structures fabricated by micro electrical discharge machining (EDM) deposition was studied.
气中微细电火花沉积加工作为电火花加工领域的一种新方法，是传统加工方法的一大突破。
As a new method in the field of EDM, micro-EDM deposition (EDD) in gas is a big breakthrough in traditional manufacture.
型孔喷口的最小特征尺寸采用微细电火花逐层扫描加工得到。
Then the smaller feature size of spout holes is achieved by micro-EDM with layer-by-layer scan machining.
试验表明，这种高质量的脉冲电源为改善微细电火花线切割加工整体性能、拓展加工领域提供了技术保证。
A large quantity of experiment show that this MWEDM pulse generator can improve overall process performances, provide guarantee of technology for expanding machining field.
试验表明，这种高质量的脉冲电源为改善微细电火花线切割加工整体性能、拓展加工领域提供了技术保证。
A large quantity of experiment show that this MWEDM pulse generator can improve overall process performances, provide guarantee of technology for expanding machining field.
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