本发明的涂料组合物可用作光致抗蚀剂的覆盖涂层，包括可用在浸渍平版印刷工艺中。
Coating compositions of the invention are useful as photoresist overcoat layers, including in immersion lithography processing.
本发明的涂料组合物可用作光致抗蚀剂的覆盖涂层，包括可用在浸渍平版印刷工艺中。
Coating compositions of the invention are useful as photoresist overcoat layers, including in immersion lithography processing.
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