本文介绍了一种采用光学象散原理测试原子力显微镜的力传感器固有频率测试系统的原理、组成和测试方法。

In this paper, the principle, constitution, and operation of the testing system for the resonant frequency of the force sensor are presented.

youdao

本文介绍了一种采用光学象散原理测试原子力显微镜的力传感器固有频率测试系统的原理、组成和测试方法。

In this paper, the principle, constitution, and operation of the testing system for the resonant frequency of the force sensor are presented.

youdao