大规模集成电路检测设备之一台阶测量仪是采用LVDT传感器拾取信号的，其设计合理与否直接关系到仪器的测量精度。
Step height measurement instrument, was one of the LSI test equipment, and the step height signal can be acquired using LVDT transducer.
大规模集成电路检测设备之一台阶测量仪是采用LVDT传感器拾取信号的，其设计合理与否直接关系到仪器的测量精度。
Step height measurement instrument, was one of the LSI test equipment, and the step height signal can be acquired using LVDT transducer.
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