介绍了一种基于线阵CCD的光刻机调焦调平系统，讨论了其检测和控制原理。
A focus and level system of stepper based on linear array CCD was introduced, its testing and controlling principles were discussed.
电池片表面无划伤，但对于在制作过程中采用激光刻蚀工艺的电池的边沿刻蚀线除外。
No scratch allowed, with exception of laser scratched lines for the cells fabricated with laser for edge isolation.
弥补了原子光刻技术中利用激光驻波场控制原子堆积只能制作单一量子点、线等周期性图形的不足。
It can make up the shortage that only the periodic dots or lines can be made when using laser standing wave field to control the atoms to stack on wafer in atom lithography.
该系统可以在有间隙的情况下进行光刻，并通过实验给出了刻制不同宽度刻线时的间隙量大小。
This system is used for photolithographys with clearance existed. The clearances for manufacturing different width of lines gained from experiments are presented.
采用在接地板上光刻出光子带隙结构形成新型的微带线，利用FDTD数值仿真和实验的方法进行了研究。
Defected ground planes have been adopted to build up novel microstrip lines. Numerical simulation based on FDTD method and experiments have been carried out?
采用在接地板上光刻出光子带隙结构形成新型的微带线，利用FDTD数值仿真和实验的方法进行了研究。
Defected ground planes have been adopted to build up novel microstrip lines. Numerical simulation based on FDTD method and experiments have been carried out?
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