从理论上讨论了离子束入射角度对原子混合、热峰效应、薄膜内应力及亚稳结构形成的影响。
The results were discussed according to the influence of skew incidence Angle on atomic mixing, thermal spike, internal stress and the formation of metastable structures.
从理论上讨论了离子束入射角度对原子混合、热峰效应、薄膜内应力及亚稳结构形成的影响。
The results were discussed according to the influence of skew incidence Angle on atomic mixing, thermal spike, internal stress and the formation of metastable structures.
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