There exist the charging effects because of charge accumulation at the surface of dielectric, which decrease the dielectric surface potential and the ion implant energy.
在介质表面存在电荷积累引起的充电效应，这降低了介质表面电势和离子注入能量；
There exist the charging effects because of charge accumulation at the surface of dielectric, which decrease the dielectric surface potential and the ion implant energy.
在介质表面存在电荷积累引起的充电效应，这降低了介质表面电势和离子注入能量；
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