However, it is still a question how to determine sputtering process parameters, microstructure and properties of thin films.
然而溅射工艺参数的选取以及沉积的薄膜结构和性能是人们主要关注的课题。
However, it is still a question how to determine sputtering process parameters, microstructure and properties of thin films.
然而溅射工艺参数的选取以及沉积的薄膜结构和性能是人们主要关注的课题。
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