Online correction of setup error using EPID in order to reduce systematic error and random error and then improve setup precision.
在EPID系统下进行实时摆位误差纠正，可进一步降低摆位系统误差和随机误差，提高摆位精度。
Online correction of setup error using EPID in order to reduce systematic error and random error and then improve setup precision.
在EPID系统下进行实时摆位误差纠正，可进一步降低摆位系统误差和随机误差，提高摆位精度。
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