着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。
In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.
纳米非晶金刚石薄膜具有良好的生物相容性,对人体无毒无害。
Nanometer amorphous diamond film has no toxicity to human body and no harm to health.
纳米非晶金刚石薄膜具有良好的生物相容性,对人体无毒无害。
Nanometer amorphous diamond film has no toxicity to human body and no harm to health.
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