The influence of reaction temperature and gas flow rate on purification efficiency was studied.
研究反应温度和气体流量对磷化氢净化效率的影响。
The results show that flow rate, microwave power and reaction temperature are key factors.
实验结果表明，气体流量、微波功率和反应温度对脱硫、脱氮率影响较大。
The results show that flow rate, microwave power and reaction temperature are key factors.
实验结果表明，气体流量、微波功率和反应温度对脱硫、脱氮率影响较大。
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