Single dry plate, diaphragm spring type, hydraulically operate.
单干板，膜片弹簧式，液压操作。
The diaphragm was made with mask plate technology of MEMS.
光线引入器采用了MEMS工艺的掩模板制备工艺。
Magnetic valve seat, diaphragm and valve plate combined design.
磁性阀座、覆膜阀片组合设计。
Magnetic valve seat, diaphragm and valve plate combined design.
磁性阀座、覆膜阀片组合设计。
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