Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
A type of capacitive microsensor whose null point and gain can be regulated is introduced here.
文中介绍一种可调零点和增益的电容式微型传感器。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
An electric field microsensor based on electrostatic comb -driven and differential detecting was presented.
研制了一种基于静电梳齿激励、差分检测式微型电场传感器。
The results show that the microsensor has excellent linearity, high sensitivity and relatively good stability.
结果表明：该微传感器具有良好的线性工作范围、良好的稳定性和较高的灵敏度。
The microsensor will be able to monitor the progression of the biological fixation between bone tissue and the implant.
这种微型感应器可以监测骨组织和移植物间的生物融合进程。
A new biomimetic microsensor modeled on trichoid sensillum of insects which can detect low velocity gas flow is demonstrated.
给出一种基于昆虫毛状感触器的微型仿生传感器，用以测量低速气体流动。
The results show that this microsensor is not only used to measure the magnitude of magnetic intensity, but also applied possibly to monitor the direction of vector of the magnetic field.
结果表明：微传感器件不仅可以测量出磁场的大小，而且给出了测量磁场矢量方向的可能性。
As a result of combination of microsensor technology, low power computing and wireless networking, wireless sensor networks is a novel technology about acquiring and processing information.
无线传感器网络作为计算、通信和传感器三项技术相结合的产物，是一种全新的信息获取和处理技术。
Introduced the capacitive pressure microsensor produced by Si-Si bonding technology in terms of the practicality of MEMS products. The producing technology and major diagrams were given in detail.
从应用开发MEMS产品的实用角度出发，介绍了利用硅一硅键合技术制作的微型电容式压力传感器，给出了详细的制作工艺及主要工艺步骤图。
Introduced the capacitive pressure microsensor produced by Si-Si bonding technology in terms of the practicality of MEMS products. The producing technology and major diagrams were given in detail.
从应用开发MEMS产品的实用角度出发，介绍了利用硅一硅键合技术制作的微型电容式压力传感器，给出了详细的制作工艺及主要工艺步骤图。
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