The results of electronic microscope scanning of sub-micrometer patterns by far ultraviolet lithography are given.

并给出远紫外光刻亚微米级图形的电镜扫描照片结果。

youdao

The results of electronic microscope scanning of sub-micrometer patterns by far ultraviolet lithography are given.

并给出远紫外光刻亚微米级图形的电镜扫描照片结果。

youdao