This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
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