This paper designs a set of MEMS dynamic testing system based on machine micro-vision.
本文设计了一套基于机器微视觉的MEMS动态测试系统。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
Based on machine micro-vision dynamic testing system for MEMS, the technique of blur image synthesis is presented to exact and analyze in-plane motion characteristic of MEMS devices.
基于机器微视觉的MEMS动态测试系统，利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析。
Among those, testing technique of dynamic characterization has the most important significance in the course of research and development of MEMS.
其中动态特性测试技术在MEMS研发过程中具有最为重要的意义。
Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
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