Imaging technique, interferometric method and ellipsometry are used in the defect detection of the thin film.
在薄膜缺陷检测领域，成像技术，干涉测量，椭偏测量等一系列测量手段都得到了应用。
Compared with general interferometric method, the modulation interferometry has an advantage of high precision.
与通常干涉仪测量方法相比，这种方法具有测量灵敏度高等优点。
A simple interferometric method for measuring the linear electro optic coefficients of poled polymer films is described.
报道了一种测量聚合物薄膜电光系数的简单方法。
The theory of nonlinear refractive-index profile measurement of fibers using two-beam interferometric method is introduced, and the result of this experiment is given.
介绍了使用双光束干涉法测量变折射率光纤设备的原理及实验结果。
Error budget estimation about conventional centering method shows that it cannot be used to control the vertex off-centering error, so interferometric method was suggested.
通过估算顶点偏心在传统定心仪上的测量误差，可以发现传统定心仪很难达到控制目的，而干涉测量方法却能得到较高的准确度。
Using traditional interferometric method, as the germanium material is too soft to process, the surface form of the test piece may not meet the requirement for the measurement.
运用传统的干涉法检验光学材料的折射率均匀性时，由于锗晶体太软，表面不易加工，其表面面形难以满足测试要求。
In this paper, a method imaging with variant space frequency linear interferometric fringe is presented and is demonstrated by experiments.
本文提出利用变空间频率直线干涉条纹对目标成像的方法，并用实验进行验证。
A new method for focal length measurement is presented based on the self-reference single plate shearing interferometric technique and compensation of spherical mirror.
基于球面补偿原理和自参考单板剪切干涉技术，提出了一种测量焦距的新方法。
This method needs no aspheric reference wavefront which is required in the conventional interferometric aspheric measurements and is extremely difficult to be produced.
本文的方法不需要产生非球面参考波前，这就避免了通常干涉方法测量非球面的特殊困难。
This sensor system simultaneously measures the three parameters using the method of low coherence interferometric signal demodulation combined with optical spectrum measurement of the FBG and EFPI.
利用FBG、EFPI和低相干性干涉信号解调方法实现了用一个传感器同时测量三个参量。
In this paper, a new method of moving target detection, radial velocity estimation and relocation based on dual aperture antenna along track interferometric SAR is proposed.
提出了一种基于双孔径天线沿航迹向干涉SAR进行动目标检测、测速及定位的新方法。
The invention discloses a high-precision absolute distance measurement system based on an interferometric phase comparison method, belonging to the technical field of precision measurement.
本发明公开了一种基于干涉相位比较法的高精度绝对距离测量系统，属于精密测量技术领域。
The invention discloses a high-precision absolute distance measurement system based on an interferometric phase comparison method, belonging to the technical field of precision measurement.
本发明公开了一种基于干涉相位比较法的高精度绝对距离测量系统，属于精密测量技术领域。
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