Firstly, the structure and electric field of interdigitated electrode piezoelectric ceramic actuator were studied.
分析了叉指形电极压电驱动器的结构特点和电场结构。
The novel structure consists of two interdigitated combs containing 21 aluminum fingers and 60 polysilicon fingers which act as the heater.
传感器结构由两对交叉的梳 状铝电极，每个为21根铝 条，以及60根多晶硅加热 条组成。
The novel structure consists of two interdigitated combs containing 21 aluminum fingers and 60 polysilicon fingers which act as the heater.
传感器结构由两对交叉的梳 状铝电极，每个为21根铝 条，以及60根多晶硅加热 条组成。
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