Experiment results show that the image quality correction sensitive matrix can be obtained in situ by this method with a high accuracy.
实验结果表明该方法可以高精度、有效地获得投影光刻机像质校正灵敏矩阵。
Image quality correction sensitive matrix is a transfer matrix, by which the image quality correction parameters can be calculated from the image quality parameters.
像质校正灵敏矩阵是像质校正算法中由像质参数计算像质校正参数的过渡矩阵。
Image quality correction sensitive matrix is a transfer matrix, by which the image quality correction parameters can be calculated from the image quality parameters.
像质校正灵敏矩阵是像质校正算法中由像质参数计算像质校正参数的过渡矩阵。
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