Compared with the resist-based coma measurement techniques, the technique based on the aerial image possess the advantage of time-saving.

结果表明，与基于硅片曝光的彗差测量方法相比，基于空间像的彗差测量技术速度上的优势十分明显。

youdao

Compared with the resist-based coma measurement techniques, the technique based on the aerial image possess the advantage of time-saving.

结果表明，与基于硅片曝光的彗差测量方法相比，基于空间像的彗差测量技术速度上的优势十分明显。

youdao