By immersing wet_etch method, slope angle of one_dimension step gratings is studied with fused silica and optimized etching liquor HF.
用浸没的湿法刻蚀方法，以熔石英为基板刻蚀材料，用优化配方的HF刻蚀液进行刻蚀，研究了HF刻蚀一维光栅台阶的斜坡陡度。
By immersing wet_etch method, slope angle of one_dimension step gratings is studied with fused silica and optimized etching liquor HF.
用浸没的湿法刻蚀方法，以熔石英为基板刻蚀材料，用优化配方的HF刻蚀液进行刻蚀，研究了HF刻蚀一维光栅台阶的斜坡陡度。
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