The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
电子束曝光机的偏转系统控制电子束偏转扫描。
This paper puts forth the calculating formula of the deflection caused by shear distortion, which has a reference value to the design of the main shaft of the machine tool.
本文给出了考虑剪切变形引起的挠度计算公式，对现代机床的主轴设计具有一定的指导意义。
This paper puts forth the calculating formula of the deflection caused by shear distortion, which has a reference value to the design of the main shaft of the machine tool.
本文给出了考虑剪切变形引起的挠度计算公式，对现代机床的主轴设计具有一定的指导意义。
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