The method was proved by being used in the design of a comb-finger micro-accelerometer.

在 梳 齿式微机械加速度计的优化设计中，对该方法进行了验证。

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The method was proved by being used in the design of a comb-finger micro-accelerometer.

在 梳 齿式微机械加速度计的优化设计中，对该方法进行了验证。

youdao