Due to the parasitic capacitance and weak output signal, which is limited by its dimensions, it is difficult to improve the resolution and stability of micro accelerometer efficiently.
在测量硅微电容式加速度传感器时，由于器件信号的微弱和寄生电容的干扰，提高加速度的稳定性和分辨率非常困难。
The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection.
提出一种带有杠杆机构的电容检测微型加速度计。
The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection.
提出一种带有杠杆机构的电容检测微型加速度计。
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