The common fabrication technologies of binary optical elements were expatiated, including etching, thin-film deposition, direct writing, excimer laser projection and gray-scale masks.
综述了二元光学元件的常用制作工艺技术，包括台阶刻蚀法、薄膜沉积法、直接写入法、准分子激光加工法和灰阶掩模法。
At last, the feasibility of fabricating light guide plate by double beam laser direct writing system is confirmed.
最后论证用双光束激光直写系统制作亚微米光栅型导光板的可行性。
Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.
激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。
A new pinhole-focusing scheme using referenced defocus signal is applied to an automatic subsystem for laser direct writing.
一种新的采用基准离焦信号的针孔调焦方案，用于激光直写的自动对焦子系统。
The lithography technique to fabricate the curved microlens array on the curved substrate by using laser direct writing system was also given.
文中给出了用激光直写设备在曲面基底上进行光刻来制作曲面微透镜阵列的方法。
To improve the precision of the laser direct writing device, researches have been done for the focusing servo system.
为了提高在激光直写设备中光刻系统的写入精度，对光探头调焦系统进行了研究。
An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.
提出了一种基于强度调制型空间光调制器(SL M)的并行激光直写系统，建立了该系统的数学模型。
The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.
通过双远心成像光路，激光直写（LDW）系统SVG-LDW04把液晶空间光调制器（LCD-SLM）上的光斑直接成像在光刻胶板上，得到高质量的光斑图形。
DOE with high diffractive efficiency can be fabricated by laser aided fabrication technology LDWS (laser direct writing system), similar to the way manufacturing micro electronics.
采用类似于微电子加工手段的激光辅助制造技术——激光直写技术，可以制作具有高衍射效率的DOE。
The experimental exposure results on the laser direct writing system showed good agreements with the theoretical calculation.
在激光直接写入系统上的曝光试验结果与理论计算相符。
A model for compensation of radial shift was established to further improve fabrication precision during polar laser direct writing.
为了进一步提高光学元件的线条制作精度，建立了极坐标激光直写时线条中心径向漂移的补偿模型。
A linewidth stabilizing method for defocusing laser direct writing is proposed for further improvement of line quality of diffractive optical elements.
为了提高激光直写加工衍射光学元件时的线条质量，提出一种离焦激光直写的线宽稳定方法。
The character of the laser direct writing device (LDWD) is analyzed.
分析了激光写入与加工设备的特点。
The effects of laser power, frequency, writing speed and procedures on the quality of the chip was evaluated.
研究了激光功率，频率，扫描速度等参数及加工程序对芯片加工质量的影响。
Femtosecond laser direct writing in transparent materials and the two-photon photopolymerization technology are used to fabricate the phase-gratings and Dammann grating.
采用飞秒激光透明材料改性和飞秒激光双光子聚合技术制备了位相光栅和达曼光栅等微光学元件。
This article presents the facture of a holographic optical element for laser direct writing synthetic holograms.
文章旨在提出一种用于激光直写合成全息拍摄的全息光学元件的制作技术。
An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented.
提出对不同焦距写入物镜下的焦斑，利用同一个DOE加以整形的方法。
DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ion milling and thin film deposition.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
This paper presents a widely available CO2 laser scriber to perform the direct-writing ablation of poly (methyl methacrylate) (PMMA) substrate for the development of microfluidic chips.
提出一种广泛使用的CO2激光法，以直接读写烧蚀的方式，进行快速的聚甲基丙烯酸甲酯(PMMA)基材的微流控分析芯片的制造。
The exposure dose distribution and line width control for the laser direct writing system are analyzed. Some experiments are also carried out.
对激光直写光刻的曝光量分布和线宽控制进行了相关理论分析和实验。
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.
在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。
In the BOE laser direct-writing device, the adjusting effect of spindle velocity is one of the key factors for determining the lithography effectiveness and accuracy.
在二元光学元件激光直写设备中，主轴速度调节效果的好坏是决定刻划效率与精度的关键因素之一。
The method for the graphic input in a laser-induced thermal etching system and writing device is described.
介绍了激光蚀刻、书写设备中的图形输入方法，着重讨论了图像预处理、直线段识别和圆弧识别的数学方法。
Through the curve of resonant wavelength versus period, we present a new method to analyze the shift of resonant wavelength of LPFG during UV laser writing without solving the coupled-mode equations.
它通过常见的谐振波长与周期的关系曲线，不用解耦合模方程就可以直接分析LPFG的振波长的漂移和调谐特性。
In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.
设计了一种具有方形光斑的新型激光直写系统，用双远心投影透镜组获得方形光斑并以逐点光刻模式运行， 改善了衍射图形光刻质量， 提高了系统运行效率。
In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.
设计了一种具有方形光斑的新型激光直写系统，用双远心投影透镜组获得方形光斑并以逐点光刻模式运行， 改善了衍射图形光刻质量， 提高了系统运行效率。
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