The overexposure technique is valuable for fabrication of devices with stabilized linewidth such as integrated optical gyroscope with spiral waveguide.
过曝光技术对线宽稳定度要求较高的器件,比如具有螺线波导的集成光学陀螺的制作有较重要价值。
The overexposure technique is valuable for fabrication of devices with stabilized linewidth such as integrated optical gyroscope with spiral waveguide.
过曝光技术对线宽稳定度要求较高的器件,比如具有螺线波导的集成光学陀螺的制作有较重要价值。
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