Vacuum sputter coating has better stability than smearing film while smearing film has better response electric characteristics than vacuum sputter coating.
真空镀膜稳定性比涂膜好，涂膜的响应、导电性比真空镀膜好。
The heating equipment of vacuum sputter coating apparatus always sparks during sputtering, Using metal-screening and surface earth can solve this problem well.
真空溅射镀膜设备中加热装置在镀膜时常出现打火现象，本文采用金属屏蔽和外壳接地的方法很好地解决了这一问题。
The new concept of the vacuum pipe sputter self-coating is introduced first, and special cathode target structure is introduced to get favorable coating.
首先提出真空管道自体真空镀膜新概念，采用特殊的阴极靶结构设计成功的解决了长管道内表面直流溅射镀膜的难题。
The new concept of the vacuum pipe sputter self-coating is introduced first, and special cathode target structure is introduced to get favorable coating.
首先提出真空管道自体真空镀膜新概念，采用特殊的阴极靶结构设计成功的解决了长管道内表面直流溅射镀膜的难题。
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