Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
以超高密度信息存储技术为应用背景，设计了低刚度高谐振频率的新型微压电悬臂梁探针，并安排了探针加工工艺流程。
Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
以超高密度信息存储技术为应用背景，设计了低刚度高谐振频率的新型微压电悬臂梁探针，并安排了探针加工工艺流程。
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