The system comprises low frequency-difference two-frequency laser interferometer measuration module, micro-detection device and two dimension platform.
系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。
The system comprises low frequency-difference two-frequency laser interferometer measuration module, micro-detection device and two dimension platform.
系统由低频差双频激光干涉度量模块和微探头及二维工作台两部分组成。
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