Influence of thin film stress is very significant on thin film properties.
薄膜应力对薄膜性能具有重要的影响。
The measurement of thin film stress is always a problem with great difficulty.
薄膜应力的测量一直是一个困难的问题。
Through the selection of processing parameters and surface modification. The distribution of thin film stress is possible changed and thin film property is improved.
通过选择适当的工艺条件以及表面处理可以改变薄膜的应力分布，提高薄膜的性能。
The progress of thin film stress development mechanisms and stress experimental study is introduced. The dominant direction of the study of thin film stress is discussed.
主要介绍了薄膜应力形成机理和应力实验的研究进展，并探讨了薄膜应力研究的发展趋势。
In order to meet the requirements of optical, electronic and mechanical performance of semiconductor products, it is necessary to measure thin film stress during the deposition.
为使半导体产品达到所要求的光学、电子和机械性能，必须实时地在沉积过程中直接测量薄膜应力。
The measurement of stress change in thin film by Substrate Curvature method is introduced in this paper.
有关薄膜应力的一般测量方法存在精度不高和不能实时测量的缺点。
Two-dimensional finite element modeling was used to simulate the thermal stress in unpassivated and passivated aluminum thin film interconnects.
对有钝化层与无钝化层的铝互连线的热应力进行了数值模拟，并建立起互连线的二维有限元模型。
This paper introduces a method for the measurement of stress of thin film. In this method a long focal distance microscope is used and deformation of the thin film on thin glass sheet is observed.
本文介绍一种利用长焦距显微镜观察玻璃薄片由镀膜淀积引起的形变来测量薄膜应力的方法。
The invention can carry-off membrane stress, which improves the binding force of thin film and plastic rubber background.
本发明可消除薄膜应力，提高薄膜与塑胶基底间的结合力。
A polysilicon thin film pressure sensor is presented. It utilizes polysilicon thin film as stress sensitive material.
介绍一种以多晶硅薄膜为敏感材料的压力传感器。
The influence of roughness of thin film surface on the measurement of the intrinsic stress has been discussed theoretically.
薄膜表面粗糙度对内应力的测量产生复杂的影响。
The residual stress is an important factor for optic thin film quality, and it has an adverse effect on the optical components.
残余应力是光学薄膜研究的一个重要组成部分，它对光学元器件有很大的影响。
A new method based on multi - beam to measure the stress of optical thin film is introduced the stress can be obtained by measuring the relative distances between the reflected light spots.
介绍了一种基于多光束原理的薄膜应力测试方法，通过对反射光光点间距变化的检测，可以实时得到应力的信息。
Cold-formed steel cross section on the residual stress distribution is curved, and hot rolling steel or steel section on welding residual stress distribution is a thin film type.
冷弯薄壁型钢截面上的残余应力分布是弯曲型的，而热扎型钢或焊接型钢截面上残余应力分布是薄膜型。
Cold-formed steel cross section on the residual stress distribution is curved, and hot rolling steel or steel section on welding residual stress distribution is a thin film type.
冷弯薄壁型钢截面上的残余应力分布是弯曲型的，而热扎型钢或焊接型钢截面上残余应力分布是薄膜型。
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