The thermal conductivity sensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS技术和半导体工艺集成而成的热导传感器，有效提高了测量精度和可靠性；
The thermal conductivity sensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS技术和半导体工艺集成而成的热导传感器，有效提高了测量精度和可靠性；
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