It is showed that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single crystal silicon.
研究结果表明，对于微晶玻璃等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、砂轮速度、进给量及磨削深度等因素有关。
It is shown that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single silicon.
研究结果表明，对于单晶硅等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、进给量等因素有关。
It is shown that the surface roughness is mainly related with the average grain size and feed per wheel revolution for the brittle materials such as single silicon.
研究结果表明，对于单晶硅等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、进给量等因素有关。
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