The results showed that the implanted silicon ions have no influence on the top Si but created Si nanocrystals (clusters) in the BOX.
研究结果表明，硅离子的注入并未对顶层硅的性能产生明显的影响，对BOX层的影响主要是产生了硅纳米团簇。
The results showed that the implanted silicon ions have no influence on the top Si but created Si nanocrystals (clusters) in the BOX.
研究结果表明，硅离子的注入并未对顶层硅的性能产生明显的影响，对BOX层的影响主要是产生了硅纳米团簇。
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