Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
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