• Finally, this paper primarily establishes a testing method of characterization silicon carbide wafer quality.

    最后初步确立表征碳化硅单晶抛光片质量测试方法

    www.boshuo.net

  • Characterization method of defects in silicon carbide by chemical etching and optimal process parameters are obtained.

    论文得到腐蚀表征碳化硅材料缺陷方法优化工艺参数

    www.boshuo.net

  • The research about silicon carbides was at the initial stage, especially the characterization, formation mechanism and distribution of defects.

    目前碳化硅研究仍然处于起步阶段尤其是缺陷表征形成机理分布都没有深入研究

    www.boshuo.net

  • The research about silicon carbides was at the initial stage, especially the characterization, formation mechanism and distribution of defects.

    目前碳化硅研究仍然处于起步阶段尤其是缺陷表征形成机理分布都没有深入研究

    www.boshuo.net

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