X ray diffraction and Rutherford Back Scattering techniques were adopted to investigate and analyze the oxidation characteristics of the films.

离子注入后进行了氧化试验，并结合X射线衍射和卢瑟福背散射进行了分析。

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X ray diffraction and Rutherford Back Scattering techniques were adopted to investigate and analyze the oxidation characteristics of the films.

离子注入后进行了氧化试验，并结合X射线衍射和卢瑟福背散射进行了分析。

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