The beam delivery system is optimized and simulated and its optical path and imaging quality diagrams are plotted.
对导光系统进行了优化和模拟，给出了导光系统的光路图及成像质量图。
Bying adding an oscillator mirror in the imaging path, thus the enlarged image will be scanned by the narrower slit, and the optical boundary information is converted into gradient electrical pulse.
在显微物镜的成象光路中，增加一块振荡反射镜，使被测线宽的放大象相对窄缝扫描，将光学边界信息转变为梯形电脉冲。
Bying adding an oscillator mirror in the imaging path, thus the enlarged image will be scanned by the narrower slit, and the optical boundary information is converted into gradient electrical pulse.
在显微物镜的成象光路中，增加一块振荡反射镜，使被测线宽的放大象相对窄缝扫描，将光学边界信息转变为梯形电脉冲。
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