• Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputtering coating, which gives another approach to lower voltage magnetron sputtering.

    此外B增加显著降低了溅射镀膜工艺的着火电压维持放电电压,实现电压磁控溅射提供了另外一种思路。

    youdao

  • Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputtering coating, which gives another approach to lower voltage magnetron sputtering.

    此外B增加显著降低了溅射镀膜工艺的着火电压维持放电电压,实现电压磁控溅射提供了另外一种思路。

    youdao

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