Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputtering coating, which gives another approach to lower voltage magnetron sputtering.
此外,B的增加显著降低了磁控溅射镀膜工艺的着火电压和维持放电电压,为实现低电压磁控溅射提供了另外一种思路。
Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputtering coating, which gives another approach to lower voltage magnetron sputtering.
此外,B的增加显著降低了磁控溅射镀膜工艺的着火电压和维持放电电压,为实现低电压磁控溅射提供了另外一种思路。
应用推荐