Microgripper technique was one of important parts in micromachine techniques.
微夹钳技术是微机械技术的重要内容之一。
A new type of zine oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology.
利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。
Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc.
采用双面对准光刻工艺，各向异性腐蚀微机械加工制硅膜片等新技术。
The detail of the production is described. The experiment results show that the micromachine sound sensor with the integral structure is one with high Q-factor, hi…
实验表明，采用该集成化结构设计的硅微声传感器，具有高的Q值、高的信噪比及很强的抗干扰能力。
The CAD technology in micromachine rapid prototyping system is presented. The design of the slicing software for micromachine rapid prototyping system is discussed in detail.
介绍了微小机械快速成型系统中的CAD技术，详细讨论了微小机械快速成型系统切片软件的设计，为开发微小机械快速成型系统奠定了基础。
The soap salt and phosphazene compound lubricating film with nanometer thickness is expected to be applied in an air bearing, an electric touch switch, a micromachine and other devices.
具有纳米厚度的皂盐复合薄膜可望在气浮轴承、电接触开关、微型机械等装置中得到应用。
The soap salt and phosphazene compound lubricating film with nanometer thickness is expected to be applied in an air bearing, an electric touch switch, a micromachine and other devices.
具有纳米厚度的皂盐复合薄膜可望在气浮轴承、电接触开关、微型机械等装置中得到应用。
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