The amendment expressions and the effective parameters have been utilized to amend the result of the AFM linewidth measurement on a microelectronic mask.
采用此公式和探针的原位参数对掩膜板的AF M线宽测量结果进行了修正。
The amendment expressions and the effective parameters have been utilized to amend the result of the AFM linewidth measurement on a microelectronic mask.
采用此公式和探针的原位参数对掩膜板的AF M线宽测量结果进行了修正。
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