An optical micro-displacement measurement method based on elliptic spot and off-axis principle is proposed.
提出一种基于离轴法并采用椭圆光斑的光学微位移计量手段。
In this thesis, based on the CD ROM laser auto-focusing detecting principle, a low-cost, high-precision, non-contact micro-displacement measurement sensor system is developed.
本文基于激光自动聚焦探测原理研究开发了一种低成本、高精度的非接触式微位移传感器。
Abstract: in order to accurately measure the pulse equivalent and return difference of stepping motor, a laser micro-displacement measurement system is proposed based on thin film interference.
摘要：为了精确测量步进电机的脉冲当量和回程差，提出了一种基于薄膜干涉原理的激光微位移测量系统。
A new micro constant force displacement sensor with micro and constant measurement force is introduced. It can realize the measurement of bullet marks without damage on the surface of sample bullets.
该系统采用了一种新型的微恒力位移传感器，该传感器具有测量力小且恒定的特点，因此，可以实现对弹头表面痕迹的无损测量。
Variable-gapcapacitance sensor has high sensitivity, specially applying to non-contact measurement of micro displacement, and slightly affecting the system to be measured.
变气隙式电容传感器具有灵敏度高、特别适用于微小位移的非接触测量，对被测系统影响小。
A dynamic measurement device of micro mass on-line utilizing microcomputer, flexible component and fibre-optic displacement sensor with high precision is presented.
介绍了一种由高精度光纤位移传感器、弹性元件和微机组成的分辩率为毫克级的在线微小质量动态测量系统。
For improving accuracy of the micro-displacement detection in stiffness measurement, this paper presents an image micro-displacement detection method.
为提高刚度测量中位移检测的精度，提出一种图像式微位移检测方法。
Capacitive sensors from Micro-Epsilon are used, among other things, for the positioning, displacement measurement and thickness measurement in the semiconductors area.
德国米铱公司提供的电容式位移传感器被用于以纳米级的精度校准芯片光刻机中镜片的位置，测量晶圆厚度等应用。
The Finite Element Analysis and experiment method were applied respectively to validate the veracity of the micro-displacement method. And the results show that this measurement method is feasible.
分别采用有限元分析和试验标定法对支撑鼓泡塔的悬挂系统进行检测，结果表明微位移的测量方法准确、可行。
Its precision, error, sensitivity and stability have greater raising than traditional measurement technique, the full automatic measure of micro-displacement is realized.
与传统测量方法相比，其精度、误差、灵敏度及稳定度都有较大提高，并实现了微位移的全自动测量。
The precision, sensitivity and stability in this system have been improved compared with traditional measurement technique, the full automatic measurement of micro-displacement is realized.
与传统测量方法相比，其精度、灵敏度及稳定性能有较大提高，并实现了微位移的全自动测量。
Measurement and control system are made up of the control host computer, motion control card and intelligent laser micro-displacement sensor.
以工业控制计算机为控制主机，选择了运动控制卡和智能型激光位移传感器，组成了测量控制系统。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
应用推荐