Combining magnetron sputtering technology designs and makes membrane porous silicon sensor, it has good resistance and capacitance response when adsorbs alcohol.
结合磁控溅射技术设计制作了薄膜型多孔硅乙醇气敏元件，吸附乙醇时具有良好的电阻和电容响应。
The geometrical thickness, which was obtained from the capacitance of membrane, can be used to characterize the existence of membrane.
根据界面双层电容值可用来判定自组膜的存在 ，也能得到膜的几何厚度 ；
The geometrical thickness, which was obtained from the capacitance of membrane, can be used to characterize the existence of membrane.
根据界面双层电容值可用来判定自组膜的存在 ，也能得到膜的几何厚度 ；
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