A layout method for a mask includes creating dummy pattern inhibiting regions and a single dummy pattern type for a layer.
一种掩模的布图方法,包括为一层建立虚设图案抑制区域和单一类型的虚设图案。
A layout method for a mask includes creating dummy pattern inhibiting regions and a single dummy pattern type for a layer.
一种掩模的布图方法,包括为一层建立虚设图案抑制区域和单一类型的虚设图案。
应用推荐