An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber.
本发明公开了一种用于产生离子流的示例性离子源，所述离子源具有至少部分地界定电弧室的离子化区的铝合金电弧室主体。
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber.
本发明公开了一种用于产生离子流的示例性离子源，所述离子源具有至少部分地界定电弧室的离子化区的铝合金电弧室主体。
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